Sensors for Semiconductor Manufacturing

TE Instrumentation supports manufacturers, OEMs, system integrators and engineering teams in the Dutch semiconductor industry with pressure and temperature sensors for critical process equipment. As exclusive distributor for Setra and GEMS in the Netherlands, and manufacturer of Thermo Electric temperature sensors, we combine product selection with technical application knowledge.

The solutions on this page are relevant to ultra-high-purity gas distribution, gas cabinets, valve manifold boxes, gas sticks, purge-gas systems, process tools, leak testing, test equipment and temperature profiling. The correct configuration is always selected from the medium, measuring range, purity requirements, process connection, output and integration into the machine or system.

Pressure measurement in semiconductor gas and process systems

Semiconductor manufacturing uses bulk and specialty gases that are delivered through a gas-distribution system to the process equipment. Pressure measurement may be needed in gas cabinets, distribution panels, valve manifold boxes, gas sticks, purge-gas lines and at the process tool. Stability, material compatibility, effective purging and contamination control are important selection considerations.

Setra describes pressure applications throughout the gas-distribution chain, from bulk and specialty gases to the process tool. Load-lock pressure management, in-situ process measurement and leak detection are also among the application areas. TE Instrumentation helps translate the measurement need into a technically appropriate sensor and configuration.

Setra Model 225 for ultra-high-purity gas pressure

Setra Model 225 is the primary Setra solution in this cluster for high-purity gas delivery and semiconductor processes. The pressure transducer is designed for ultra-clean applications where stable measurement and contamination control are important.

Important design features in Setra’s current product information include:

• A low internal cavity volume to minimise particle entrapment and support purging.
• 316L VIM/VAR stainless-steel wetted parts.
• Mass-spectrometer helium leak testing of every sensor.
• Face-seal process connections and other available fitting options.
• Voltage and current outputs for integration into control and measurement systems.
• Capacitive sensing technology with high stability and resistance to EMI/RFI effects.

A final Model 225 configuration depends on pressure type, measuring range, gas, process purity, connection, electrical output and installation requirements. Send us your specification for review.

View the Setra Model 225 product page

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Model ASL for accurate differential-pressure and leak testing

Setra Model ASL measures low differential pressure at high accuracy. It is primarily a demanding test-and-measurement product rather than a semiconductor-only sensor. Within semiconductor equipment, ASL may be relevant to qualified applications such as leak-test systems, filter pressure, part-integrity testing and accurate test stands.

Current Setra information lists high overpressure capability, SecureCal calibration, unidirectional and bidirectional versions, and multiple pressure and electrical fittings. Technical suitability must be assessed for each measuring point.

Model 270 for barometric, absolute and gauge pressure

Setra Model 270 is a high-accuracy analogue sensor for barometric, absolute and gauge pressure. Its ceramic SETRACERAM sensing technology is designed for stable measurement and low hysteresis. In a semiconductor environment, Model 270 may be considered for environmental measurement, test and calibration systems, or other applications where these pressure types are technically required.

Model 270 is not an ultra-high-purity process-gas sensor; that role in this cluster belongs primarily to Model 225. TE Instrumentation helps prevent the selection of a precise instrument for the wrong pressure type or medium.

Thermo Electric temperature sensors for semiconductor processes

Alongside pressure measurement, TE Instrumentation designs and manufactures Thermo Electric spike and profile thermocouples for the semiconductor and solar industries. These sensors are used to capture temperature profiles and temperature differences across multiple measuring points.

Available design features include individual ceramic insulation sleeves for up to ten channels, positive and negative thermocouple wires over the full length, robust construction, accurate measuring-point positioning and designs that support decontamination. Semiconductor thermocouples are manufactured in a dedicated clean room.

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Explore semiconductor spike and profile thermocouples

Supporting GEMS sensors and control components

The wider GEMS portfolio includes pressure, flow, level and temperature sensors, together with solenoid valves and electronic control components. These products may support fluid, cooling or equipment functions around the process. Products are never selected for high-purity or process-gas use on family name alone; material compatibility and the complete process specification must be assessed first.

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Explore pressure transducers and sensors
Explore GEMS sensors and control components
Explore GEMS flow sensors
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Explore GEMS solenoid valves

What information do we need?

Please include as much of the following information as possible with an enquiry:

• Application and location of the measuring point.
• Gas or other medium and required material compatibility.
• Pressure type: gauge, absolute, barometric or differential.
• Normal measuring range, maximum pressure and possible overpressure.
• Purity, cleanroom and contamination-control requirements.
• Process and electrical connections, output signal and supply.
• Ambient temperature, mounting and available space.
• Quantities, project phase and existing model or part numbers.

Frequently asked questions

Technical source information: Setra semiconductor pressure measurement and Setra Model 225.